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Atomic Layer Deposition

Principles, Characteristics, and Nanotechnology Applications
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Faqat Litresda o'qing

Kitobni fayl sifatida yuklab bo'lmaydi, lekin bizning ilovamizda yoki veb-saytda onlayn o'qilishi mumkin.

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Kitob haqida

Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.

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Kitob tavsifi

Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.

Kitob David Cameron, Arthur Sherman «Atomic Layer Deposition» — veb-saytda onlayn o'qing. Fikr va sharhlar qoldiring, sevimlilarga ovoz bering.
Yosh cheklamasi:
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Litresda chiqarilgan sana:
02 oktyabr 2018
Hajm:
274 Sahifa
ISBN:
9781118747421
Umumiy o'lcham:
3.3 МБ
Umumiy sahifalar soni :
274
Matbaachilar:
Mualliflik huquqi egasi:
John Wiley & Sons Limited